FLEX Conference Pass
In this research, the non-contact flexible electromyography (EMG) system has integrated the sensing electrodes using the redistribution layer (RDL) process for smart wearable devices. We have developed the non-contact EMG thin film sensors on polyimide substrates which are initially coated on Gen 2.5 glass substrates. Using the electroplating process, the copper layer of electrode was formed with thickness of 5~10 um on polyimide. Then, the shape of the electrodes was patterned with an etchant. The SiNx layer with a thickness of 200~300 nm was formed by CVD deposition, and the designed contact area was finally patterned from the SiNx layer. Furthermore, the non-contact wearable EMG system can apply to a dumbbells exercise for arm, and the test result can approve the process ability under a real-time sensing muscle activation with the signal to noise ratio (SNR) of >30 dB.
Keywords：flexible hybrid electronics, wearable device, non-contact EMG system, redistribution layer