VP, TEA Product BU & Technology Development
TEL, TX, United States
Ben Rathsack is Vice President of the TEA Product and Technology Development Group. His team is responsible for product engagement with customers as well as new technology development in lithography, etch, deposition and cleans. This includes development of advanced equipment, process, and software technologies in collaboration with TEL factories and corporate R&D teams. His team also specializes in SMART tool development including advanced computational engineering, new sensors, diagnostics, and software controls to achieve autonomous operation. He has 20 years of semiconductor development experience at Tokyo Electron and Texas Instruments. He has authored 50 publications and has 30 granted patents. He received his BS in chemical engineering from the University of Illinois/UC and his MS/PhD at the University of Texas/Austin.
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